DVIM-G Advanced Pneumatic Vibration Mount
DVIM Series is a subsystem used in equipment with linear stages to both minimize floor vibrations and the residual vibrations from after the stage motions occur. DVIM-G offers the fastest payload settling time, predominant vibration isolation and superior damping among DVIM Series.
DVIM-G employs the special mechanical filter system and unique design to obtain its low natural frequency of 1.0 Hz – 1.2 Hz, delivering vibrations from a floor effectively.
Applications
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Inspection Equipment with Motion Systems
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Semiconductor/FPD Manufacturing Inspection Equipment
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Optical Laser Equipment
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OEM
DVIM-M Standard Pneumatic Vibration Mount
DVIM-Series provides much more damping than ISO pneumatic vibration isolators and it is a subsystem used in linear XY stages to minimize vibrations and stabilize the stages after the stage motions occur. DVIM-M offers fast payload setting time, high vibration isolation performance level and damping at affordable price.
DVIM-M provides the high level of vibration isolation in both vertical and horizontal axis. DVIM-M pneumatic isolators are optimized to offer the maximum vibration isolation performance within the heavy and high-speed linear XY stages.
Applications
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Linear stages
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Semiconductor/FPD Manufacturing Inspection Systems
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Optical Laser Equipment
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OEM applications
DVIM-F Basic Pneumatic Vibration Mount
Pneumatic Vibration Isolation System At Affordable Price
DVIM-F consists an air spring, providing vibration isolation in both vertical and horizontal axis at affordable price. In addition, since DVIM-F isolators isolate systems from vibration through the air spring, durability of the isolators are outstanding; therefore, users do not need to worry about replacing the isolation system with new ones. DVIM-F pneumatic isolators are recommended for the stages requiring less vibration isolation, damping and settling time.
When DVIM-F isolators are used with built-in oil dampers, the movements of X-Y linear stages are minimized, the payload settling time is reduced, and stiffness of the isolators are increased.
Applications
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Linear X-Y stages
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Semiconductor Manufacturing & Inspection Equipment
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LCD Manufacturing & Inspection Equipment
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Optical Laser Machines
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OEM applications