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OWIS – Nanopositioning Systems

Nano Linear Stages

The OWIS Nano Linear Stages are equipped with a piezo inertial drive. They are also available with an integrated measuring system by the same dimensions. The combination of the nanopositioner on top of the linear stage is possible without adapter plate.

  • high speed in full step motion
  • main body and carriage made of wear resistant aluminium alloy, black anodized
  • high linearity of the step sizes at constant control voltage and frequency
  • optional measuring system with a resolution of 100 nm

Nano Elevator Stage NHV 24-6

The OWIS Nano Elevator Stage NHV 24-6 is equipped with a piezo inertial drive, with the following features:

  • increments of 200 nm and 700 nm with manual control unit NHS 06
  • high speed in full step motion
  • main body and elevator stage made of wear resistant aluminium alloy, black anodized
  • high linearity of the step sizes at constant control voltage and frequency
  • optional measuring system with a resolution of 100 nm
  • versions for use in vacuum available

Nano Rotary Stage

The OWIS Nano Rotary Stage NDT 24-30 is equipped with a piezo inertial drive. The adjustment area is unlimited.

 

  • increments of 40 µrad and 90 µrad with manual control unit NHS 06
  • high speed in full step motion
  • main body and rotary stage made of wear resistant aluminium alloy, black anodized
  • high linearity of the step sizes at constant control voltage and frequency
  • optional measuring system with a resolution of about 8 µrad
  • versions for use in vacuum available

Nano-Goniometers

The OWIS Nano Goniometer NAGO T 24-8 is equipped with a piezo inertial drive. The adjustment range is 0.11 rad by speed about 20 mrad/s. The smallest step angle is about 2 µrad.

  • increments of 2 µrad and 6 µrad with manual control unit NHS 06
  • high speed in full step motion
  • main body and rotary stage made of wear resistant aluminium alloy, black anodized
  • high linearity of the step sizes at constant control voltage and frequency
  • optional measuring system with a resolution of about 3 µrad
  • versions for use in vacuum available

Manual Control Unit NHS 06

The handy and lightweight control pad is suitable for all OWIS Nanopositioning System. Up to 6 axes, which can be controlled in two groups of each 3 axes. There are 3 different frequencies and 2 different step widths selectable, therefore six different speeds. It is possible to control the units with the provided software. The communication between PC and control unit is done via USB 1.1. An external power supply is also part of the delivery.