Denton Vacuum - Sputtering

Optical, Mirror Coatings

The Integrity® series is Denton Vacuum’s flagship system to produce optical coatings. These systems range in size from 26” to 80” and all utilize evaporation technology as the deposition modality. Most, if not all of these vacuum deposition systems are equipped with sources for ion beam assisted deposition and optical monitors are employed for the highest precision applications. The high end process requirements of this product line demand the highest levels of system automation. Typical applications include anti-reflection coatings, narrow band-pass filters, high/low pass filters, hot/cold mirrors and color correcting mirrors. All Integrity systems can be optomized for depositing metals.


Thermal Deposition Systems 

The Explorer® series represents Denton’s workhorse offering in R&D systems. The Explorer® can be configured for thermal evaporation, electron beam evaporation, multi-cathode ion beam sputter deposition and PECVD. Incorporating the same controls as the Discovery® and Infinity® product vacuum deposition system lines, the features and functionality of this new product line eclipse it’s replacement by an order of magnitude. The Explorer® may be equipped with various cryogenic, turbomolecular or diffusion pumping options. A glass bell jar is the standard chamber configuration although a 14” steel chamber (height sized to specific application) is the predominant configuration.


Ion Beam Sputter Deposition

The Bench Top Turbo IV (BTT-IV) is Denton's table-top high vacuum sample preparation system. Features for delivering thin film coatings include fully automatic processing, support for thermal evaporation and ion beam sputter deposition modalities.

A large 12" x 12" Bell Jar and 15” diameter stainless steel base plate, with 12 available feedthroughs, enhance flexibility of the system by permitting installation of the multiple evaporation and sputtering accessories. The interface is a color touch screen, which automates and simplifies all aspects of system operation.

EM applications include: high vacuum carbon coating for TEM & x-ray analysis; sputtering of noble metals for SEM analysis; carbon support films; carbon platinum replicas; mirror coatings; rotary shadowing; aperture cleaning; asbestos analysis; resistance evaporation of metallic compounds; failure analysis; high resolution sputtering for fine grain films.


Vacuum Deposition Systems

The Desk V series of coating systems is designed for electron microscopy sample preparation. The perfect choice for SEM sample preparation, the Desk V is available in a simple mechanically pumped configuration for sputtering of precious metals or carbon evaporation. The turbo pumped model is available for ultra fine grain sample preparation. We also offer a large capacity chamber model, the Desk V XLS, for deposition on larger samples. Carbon evaporation, either using rods or yarn, is available on all models. The Desk V series utilizes an enhanced touch screen as the operator interface. All systems include a gold or gold/palladium target (customer choice). Rotation, Tilt and Rotation and a Film Thickness Monitor are offered as optional accessories for all models (standard on XLS). Spare parts are always available. In addition, a wide variety of target materials are available.


Vacuum Coatings

The Desktop Pro is designed to address the need of high performance sputtering applications in a compact and economical desktop configuration. Drawing on the strengths of Denton Vacuum’s engineering, automation, and industry leading range of sputtering technology, including our experience with optical coating solutions, the Desktop Pro is a truly remarkable product that requires less than 36” of countertop space.

Capable of sputtering dielectric and metal films with ease, the Desktop Pro can be outfitted with up to two (2), 2.0” diameter magnetrons. The magnetrons are inclined to a rotating substrate stage; an arrangement that yields excellent film thickness uniformity (better than 5%) over the entire diameter of the stage. The system can be outfitted with either an RF, DC, or RF + DC power supply and optional magnetics to support the sputtering of ferromagnetic materials are available. Power supply output switching allows a user to power two cathodes sequentially from a single power supply; a feature that can result in significant cost savings.

The Desk Top Pro comes standard with a 65 liter/second, compound turbomolecular pump for impressive base vacuum levels, short pump downs, and gas load handling. An optional liquid nitrogen trap is available for those applications that demand high water vapor pumping speed. The operator interface uses a color touch-pad that offers high resolution graphics, manual operation and one-button automatic processes.




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ALVTechnologies Philippines Incorporated.
Unit 2308 Medical Plaza Ortigas
San Miguel Avenue, Ortigas Center
1605 Pasig City Philippines

Tel. Nos.: (632) 638-23-17
       (632) 638-23-19

Fax:         (632) 638-23-18